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Iwaki Pneumatic drive bellows pumps FS-100HT2

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Iwaki Pneumatic drive bellows pumps FS-100HT2

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Iwaki Pneumatic drive bellows pumps FS-100HT2 1

Iwaki Pneumatic drive bellows pumps FS-100HT2

Last Updated

10 Mar 2020

Country Origin

Japan

Minimum Order

1 Unit

Product Details

Specification of

Pompa Air

Features of FS-100HT2

Enhanced cleaning efficiency: Cleaning efficiency such as the removal of particles and metal contamination on wafers is improved as the circulation flow rate is increased. Cleaning times resulting from increased number of processing lines will also be reduced due to higher circulation rate.

Contamination-free: In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing.

Reduced installation area: In addition to the use of fluoroplastic wet ends (PTFE and PFA), a fluorine coating on the pump’s outer surfaces offers the best resistance to vapors from acid, alkali and hydrogen peroxide chemistries used in semiconductor manufacturing

Weight saving: Optimization of design has resultind in reduced weight of about 15% of our existing 80-100L models making installation and replacement work easier.

Specifications

Max. discharge capacity	100 L/min
Max. supplied air pressure	0.5 MPa
Max. stroke speed	120 spm
Main materials	PTFE, PFA
Liquid temperature range	10 – 180˚C

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