Specification of Iwaki Pneumatic drive bellows pumps FA series
Pompa Air
Features of FA series
There are two standardized models; the FA-2E, a lateral type for a low flow rate, and the FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray system for single wafer processing while the FA-40VEW is suitable for cleaning 200/300 mm wafers.
H-shaped thick bellows are used (Only FA-40VEW). They have excellent resistance to high pressure and a long life to withstand continuous long-time operation. When connected to a special controller, the discharge can be controlled and monitored easily.
Specifications
| Model | FA-2 | FA-40 |
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| Max. discharge capacity | 2 L/min | 40 L/min |
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| Max. supplied air pressure | 0.4 MPa |
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| Max. air consumption | 50 NL/min | 200 NL/min |
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| Max. stroke speed | 150 spm | 80 spm |
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| Main materials | PTFE, PFA |
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| Liquid temperature range | 5 – 100℃ |
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