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Iwaki Chemical replenishing pump CFD 1

Iwaki Chemical replenishing pump CFD

Iwaki Chemical replenishing pump CFD

Rp. CALL

Last Updated

16 Mar 2023

Country Origin

Japan

Minimum Order

1 Unit

Category

PUMP

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Product Details

Specification of Iwaki Chemical replenishing pump CFD

Pompa Kimia

Features of CFD series

Resolution improvement: The resolution of the CFD-1T-B has been greatly improved compared to our existing models. The minimum flow of 1mL/shot offers greater accuracy in chemical condensation control that is required in the wafer cleaning process. The CFD-1T-B always feeds the correct quantity of chemical without overshoot, eliminating excess liquid wastage. In addition, the anti-siphon mechanism prevents unintentional siphoning.

Corrosion resistant wet ends: Fluoroplastic wet ends (PTFE, PFA, PCTFE) is capable of handling the strong acids, alkalines and hydrogen peroxide required for semiconductor processing.
PTFE, PFA, PP, PVC external parts and PTFE coated screws provide additional protection against chemical attack.

Flow rate adjustment: Simply open the bottom cover to easily adjust stroke length to give between 1.0 – 2.7ml/shot. (Factory default is 1.0ml/shot)

Leak sensor: Every unit is equipped with a leakage sensor to detect any leakage immediately.

Specifications

Max. discharge capacity	1 mL/shot
Max. discharge pressure	0.05 MPa
Max. stroke speed	30 spm
Main materials	PTFE, PFA, PCTFE
Liquid temperature range	20 – 60℃

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